Vacuum evaporation system for the deposition of a thin evaporate

Details Vacuum evaporation system for the deposition of a thin evaporate Vacuum evaporation system for the deposition of a thin evaporate

1979-02-09

1980-12-30

Kimlin, Edward C.

Coating apparatus

Gas or vapor deposition

Work support

118 50, 204298, 269 57, 432124, C23C 1308

Patent

active

042416981

ABSTRACT:
A substrate carrier assembly is described which employs a frame, a plurality of rollers, a plurality of substrate carrier rings, captively held within the frame and a carrier support track. The substrate carrier assembly provides support and constraint to a plurality of substrate members, while the substrate members are coated with a thin evaporated layer. The physical configuration provided insures that a uniformly thin metal layer is formed over the substrate member.

REFERENCES:
patent: 3633537 (1972-01-01), Howe
patent: 3643625 (1972-02-01), Mahl
patent: 3675619 (1972-07-01), Burd
patent: 3749058 (1973-07-01), Slabaugh
patent: 3783821 (1974-01-01), Dobson et al.
patent: 3783822 (1974-01-01), Wollam
patent: 3797452 (1974-03-01), Dobson
patent: 3853091 (1974-12-01), Christenson et al.
patent: 3892198 (1975-07-01), Dobson
patent: 3991707 (1976-11-01), Thelen et al.
patent: 4048223 (1978-07-01), Ertl

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