Alignment device and lithographic apparatus comprising such a de

Details Alignment device and lithographic apparatus comprising such a de Alignment device and lithographic apparatus comprising such a de

1998-06-18

2000-12-12

Kim, Robert

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356400, 250548, G01N 1100

Patent

active

061606227

ABSTRACT:
An alignment device, for use in a lithographic apparatus, for aligning a first object, provided with a first alignment mark relative to a second object, provided with a second alignment mark, employs as a radiation source a laser which emits an alignment beam having a wavelength which is of the order of 1000 nm and to the order of 1100 nm.

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Dictionary of Electronic Terms, 1970 pp. 46, Col. 2.

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