Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1994-12-14
1997-09-16
Smith, Matthew S.
Photocopying
Projection printing and copying cameras
Step and repeat
355 69, 355 70, 355 71, H01L 21027, G03B 2772
Patent
active
056686242
ABSTRACT:
A scan type exposure apparatus has a mask stage for mounting a mask formed with an exposure pattern in a pattern area; a substrate stage for mounting a rectangular photosensitive substrate; a driving unit for moving the mask stage and the substrate stage in synchronism parallel to one side of the rectangular photosensitive substrate; illumination optical systems for illuminating partial areas of the mask with light beams; and projection optical systems for projecting images of the illuminated areas of the mask onto the photosensitive substrate. The projection optical system projects the light beams passing through the exposure pattern area of the illuminated mask on a central area, excluding peripheral areas, of an exposure area of the photosensitive substrate and projects the light beams passing through an area other than the exposure pattern area of the illuminated mask on the peripheral areas. The scan type exposure apparatus also has an exposure quantity control unit for setting an exposure quantity for the peripheral areas larger than an exposure quantity for the central area.
REFERENCES:
patent: 3784301 (1974-01-01), Sato
patent: 3799666 (1974-03-01), Fukushima et al.
patent: 5305054 (1994-04-01), Suzuki et al.
patent: 5359389 (1994-10-01), Isohata
patent: 5473410 (1995-12-01), Nishi
patent: 5581075 (1996-12-01), Naraki et al.
Nara Kei
Naraki Tsuyoshi
Lane David A.
Nikon Corporation
Smith Matthew S.
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