Phase shift mask and its manufacturing method

Details Phase shift mask and its manufacturing method Phase shift mask and its manufacturing method

1994-09-12

1996-06-18

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430296, 430322, 430323, 430394, G03F 900

Patent

active

055276474

ABSTRACT:
A method for manufacturing a phase shift mask of the invention comprises a process of protecting a side wall of an opening in a light-damping film by means of a resist and then etching the light-damping film to be so thin as a halftone film.

REFERENCES:
patent: 4890309 (1989-12-01), Smith et al.
patent: 5380609 (1995-01-01), Fujita et al.

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