Refrigeration – Low pressure cold trap process and apparatus
Patent
1986-10-09
1988-02-16
Capossela, Ronald C.
Refrigeration
Low pressure cold trap process and apparatus
55269, 62268, 62284, 62354, 165 94, 417901, B01D 800
Patent
active
047246774
ABSTRACT:
A high throughput continuous cryopump is provided. The cryopump (10) incorporates an improved method for regenerating the cryopumping surface (22) while the pump is in continuous operation. The regeneration of the cryopumping surface (22) does not thermally cycle the pump, and to this end a small chamber (91) connected to a secondary pumping source (60) serves to contain and exhaust frost removed from the cryopumping surface (22) during such regeneration. The frost is exhausted at a rate substantially independent of the speed of the cryopump which enhances the capability of the pump to achieve a high compression ratio and allow the pump to operate continuously while the cryopumping surface is being regenerated.
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patent: 3585807 (1971-06-01), Hengevoss et al.
patent: 3721101 (1973-03-01), Sheppard et al.
patent: 4363217 (1982-12-01), Venuti
patent: 4438632 (1984-03-01), Lessard et al.
patent: 4485631 (1984-12-01), Winkler
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