Split-beam laser apparatus for making a nozzle member

Details Split-beam laser apparatus for making a nozzle member Split-beam laser apparatus for making a nozzle member

1999-05-05

2000-09-05

Mills, Gregory

Electric heating

Metal heating

By arc

2191217, B23K 26067

Patent

active

061146544

ABSTRACT:
A work apparatus for manufacturing a nozzle member by a method including the step of splitting light from a light source by amplitude splitting to form a plurality of illumination beams, and the step of illuminating a plurality of mask patterns formed on a mask with the corresponding split illumination beams so as to expose at least a single workpiece via the mask patterns.

REFERENCES:
patent: 5153773 (1992-10-01), Muraki et al.
patent: 5263250 (1993-11-01), Nishiwaki et al.
patent: 5389954 (1995-02-01), Inaba et al.
patent: 5463497 (1995-10-01), Muraki et al.
patent: 5517000 (1996-05-01), Nishiwaki et al.
patent: 5674414 (1997-10-01), Schweizer
patent: 5676866 (1997-10-01), in den Baumen et al.
patent: 5841101 (1998-11-01), Nishiwaki

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