Electrostatic chuck

Details Electrostatic chuck Electrostatic chuck

1997-02-28

2000-06-06

Thibodeau, Paul

Stock material or miscellaneous articles

All metal or with adjacent metals

Composite; i.e., plural, adjacent, spatially distinct metal...

428332, 428450, 428469, 428447, 428448, 361234, 279128, B23B 516, B23B 906, B23B 900, B23B 1504

Patent

active

060716304

ABSTRACT:
An electrostatic chuck comprises a metallic plate, a first insulating layer formed on the metallic plate and composed of a ceramic material, an electrically conductive electrode pattern formed on the first insulating layer, and a second insulating layer formed on the conductive electrode pattern and made of an elastomer. Alternatively, the first and second insulating layers may be each made of a thermally conductive silicone rubber provided that the thermally conductive silicone rubber for the second insulating layer should have a hardness of 85 or below a surface roughness of 5 .mu.m or below.

REFERENCES:
patent: 4184188 (1980-01-01), Briglia
patent: 4931135 (1990-06-01), Horiuchi et al.
patent: 5191506 (1993-03-01), Logan et al.
patent: 5382469 (1995-01-01), Kubota et al.
patent: 5413360 (1995-05-01), Atari et al.
patent: 5645921 (1997-07-01), Matsunaga et al.
patent: 5646814 (1997-07-01), Shamouilian et al.
patent: 5753132 (1998-05-01), Shamouilian et al.
JIS-A Method (English version) K 6301-1975, pp. 10-15, 1975.

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