Fishing – trapping – and vermin destroying
Patent
1994-04-28
1995-01-03
Weisstuch, Aaron
Fishing, trapping, and vermin destroying
437 2, 437108, 437109, 427578, 136249, 136258, H01L 3118
Patent
active
053786394
ABSTRACT:
The present invention relates to a method and an apparatus for forming photovoltaic conversion layers and electrode layers with increased efficiency by forming thin film layers under optimal conditions on a belt-like flexible substrate which is transported by means two interacting rollers. Films are formed on the substrate, which remains stationary during film-formation, in film-forming chambers maintained airtight by walls pressed against the substrate via sealing materials. Furthermore, film-forming chamber walls and a ground electrode contacting one side of the substrate are retracted from the substrate surface to facilitate movement of the substrate to a next film-forming position without being damaged. The apparatus of the present invention allows not only the film-forming time and conditions, as well as the size, of each film-forming chamber to be controlled independently, but it also prevents intermingling of gases present in different film-forming chambers. In addition, by incorporating a film-forming chamber that can facilitate formation of multi-layered films, or by providing movable film-forming chambers which may be aligned with the substrate, the required time and the size of the apparatus for a device with a multi-layer structure can be shortened.
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Sasaki Toshiaki
Shimizu Hitoshi
Fuji Electric & Co., Ltd.
Weisstuch Aaron
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