Rotary, vertical-drive, tethered micromotor

Details Rotary, vertical-drive, tethered micromotor Rotary, vertical-drive, tethered micromotor

1991-12-19

1993-02-23

Stephan, Steven L.

Electrical generator or motor structure

Dynamoelectric

Rotary

310 90, 310268, H02K 122

Patent

active

051893231

ABSTRACT:
An electrostatically operated micromotor is described that includes a rotor having first and second major surfaces, an axis of symmetry, and conductive portions. First and second annular, segmented torque stators are disposed adjacent the first and second major surfaces of the rotor and a bearing tethers the rotor to a support surface. Circuitry connects to each electrode of each torque stator for applying phased signals that induce a rotational force in the rotor. Such phased signals applied to electrodes of the first torque stator differ in potential from phased signals applied to electrodes of the second torque stator, so as to electrostatically balance the rotor, whereby net forces exerted by the rotor on the bearing in the direction of the axis of symmetry are lessened.

REFERENCES:
patent: 4736127 (1988-04-01), Jacobsen
patent: 4943750 (1990-07-01), Howe et al.
patent: 5001381 (1991-03-01), Watanable
patent: 5043043 (1991-08-01), Howe et al.
"IC-Processed Micro-Motors: Design, Technology and Testing", IEEE Solid State Sensor and Actuator-Workshop, IEEE Catalog No. 90CH2783-9, (1990) pp. 1-6.
"Friction and Wear in Microfabricated Harmonic Side-Drive Motors," IEEE Solid State Sensor and Actuator Workshop, IEEE Catalog No. 90CH2783-9, pp. 17-22.
"Principals in design and microfabrication of variable-capacitance side-drive motors, Journal of Vacuum Science Technology", A8(4), Jul.-Aug. 1990, pp. 3414-3424.

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