Static information storage and retrieval – Floating gate – Particular biasing
Patent
1993-11-26
1994-12-06
Fears, Terrell W.
Static information storage and retrieval
Floating gate
Particular biasing
365 51, 365182, G11C 1300
Patent
active
053717040
ABSTRACT:
A groove is formed in a semiconductor layer, and a source region is formed at a part of the groove within the semiconductor layer. A control gate is buried via a first insulating layer within the groove. A floating gate is formed via a second insulating layer on the control gate. The floating gate extends over the first insulating layer. A drain region is formed within the semiconductor layer apart from the groove.
REFERENCES:
patent: 3660819 (1972-05-01), Frohman-Bentchkousky
patent: 4864374 (1989-09-01), Banertee
K. Naruke et al., "A New Flash-Erase EEPROM Cell with a Sidewall Select-Gate on Its Source Side", IEDM Tech. Digest, 1989, pp. 603-606.
Fears Terrell W.
NEC Corporation
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