Silicon side by side coplanar pressure sensors

Details Silicon side by side coplanar pressure sensors Silicon side by side coplanar pressure sensors

1987-09-24

1988-12-13

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73754, 73DIG4, 338 4, G01L 708, G01L 906

Patent

active

047901926

ABSTRACT:
A pressure sensor that provides for multiple diaphragm sensing regions in a side by side configuration which can be formed into a stacked monolithic batch fabricated form. The multiple pressure sensor can be constructed to sense differential or absolute pressure as desired. In preferred forms of the invention, the pressure inlets are all on the same side of the monolithic structure to easily isolate the corrosive pressure media from the sensing means, which as shown comprise strain gage sensors on the sensing diaphragms as well as from the conductors carrying signals from the sensing means. The variable strain gage resistors on the sensor diaphragms are segregated from the media in several differet ways using isolating layers. The stacked sensor configuration insures that the device can be batched fabricated so that a number of sensors can be formed on chips that are stacked and bonded together, and then separated into individual sensors.

REFERENCES:
patent: 2336500 (1943-12-01), Osterberg
patent: 3909924 (1975-10-01), Vindasius et al.
patent: 3930412 (1976-01-01), Mallon et al.
patent: 4131088 (1978-12-01), Reddy
patent: 4222277 (1980-09-01), Kurtz et al.
patent: 4287501 (1981-09-01), Tominaga et al.
patent: 4326423 (1982-04-01), Hartsmann
patent: 4528855 (1985-07-01), Singh
patent: 4565096 (1986-01-01), Knecht
patent: 4730496 (1988-03-01), Knecht et al.

Affiliated with

Also associated with

Rating

Silicon side by side coplanar pressure sensors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Silicon side by side coplanar pressure sensors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Silicon side by side coplanar pressure sensors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2190217