Apparatus for conveying semiconductor substrates

Details Apparatus for conveying semiconductor substrates Apparatus for conveying semiconductor substrates

1982-05-04

1984-11-20

Valenza, Joseph E.

Conveyors: power-driven

Conveyor for changing attitude of item relative to conveyed...

By conveying randomly faced items and turning items to...

B65G 4724

Patent

active

044834349

ABSTRACT:
An alignment apparatus for positioning a substrate in a determined position comprises three rotating rollers having outer circumferences contactable with the circumference of the substrate at three different portions thereof. A first roller and at least one of the remaining rollers are driven to rotate the substrate in a predetermined direction. A holder holds the first roller and is displaceably biased toward the remaining rollers. A rotation inhibitor comes into close contact with a flat on the substrate when the substrate comes to a predetermined rotated position in which the flat and the first roller are in opposition to each other. The rotation inhibitor is provided integrally with the holder in such a predetermined positional relation to the first roller that as a result of the close contact with the flat of the substrate, the inhibitor can inhibit the holder from being moved in the direction for contact between the first roller and the flat.

REFERENCES:
patent: 2426433 (1945-05-01), Carter
patent: 3297134 (1966-02-01), Pastuszak
patent: 3554352 (1971-01-01), Hillman
patent: 4376482 (1983-03-01), Wheeler et al.
IBM Technical Disclosure Bull., (Wafer Notch Orienter), Jukich, Miller & Spira, vol. 14, No. 8, Jan. 1972.

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