Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for measuring – testing – or sensing
Patent
1995-02-13
1996-06-25
Kunemund, Robert
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
With means for measuring, testing, or sensing
117200, 117201, 117223, C30B 1102
Patent
active
055290159
ABSTRACT:
An ampoule failure system for use in material processing furnaces comprising a containment cartridge and an ampoule failure sensor. The containment cartridge contains an ampoule of toxic material therein and is positioned within a furnace for processing. An ampoule failure probe is positioned in the containment cartridge adjacent the ampoule for detecting a potential harmful release of toxic material therefrom during processing. The failure probe is spaced a predetermined distance from the ampoule and is chemically chosen so as to undergo a timely chemical reaction with the toxic material upon the harmful release thereof.
The ampoule failure system further comprises a data acquisition system which is positioned externally of the furnace and is electrically connected to the ampoule failure probe so as to form a communicating electrical circuit. The data acquisition system includes an automatic shutdown device for shutting down the furnace upon the harmful release of toxic material. It also includes a resistance measuring device for measuring the resistance of the failure probe during processing. The chemical reaction causes a step increase in resistance of the failure probe whereupon the automatic shutdown device will responsively shut down the furnace.
REFERENCES:
patent: 4627892 (1986-12-01), Warrell et al.
patent: 5112456 (1992-05-01), Warrell et al.
patent: 5417822 (1995-05-01), Maget
patent: 5448905 (1995-09-01), Stetter et al.
NASA Tech Briefs, --Dale Watring & Martin Johnson, Sensor Detects Semiconductor Escaping from Ampoule, Sep. 1994, pp. 46-48.
NASA Tech Briefs, Dale Watring & Martin Johnson, Sensor Detects Semiconductor Escaping From Ampoule, Nov. 1994, p. 70.
Journal of Crystal Growth, Ampoule failure sensor development for semiconductor crystal growth experiments, 140 (1994) 41-44, Dale Watring & Martin Johnson.
Johnson Martin L.
Watring Dale A.
Kunemund Robert
The United States of America as represented by the Administrator
Welborn Brian S.
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