Process condition detecting apparatus and semiconductor sensor c

Details Process condition detecting apparatus and semiconductor sensor c Process condition detecting apparatus and semiconductor sensor c

1994-02-03

1996-06-25

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

With pressure and/or temperature compensation

73720, 73726, 338 42, 374198, G01L 1904, H01C 1010

Patent

active

055289401

ABSTRACT:
A differential pressure transmitter having a differential pressure sensor, a temperature sensor and a static pressure sensor all provided on the semiconductor substrate of a single semiconductor chip. A reference resistor is provided in a part of the chip. Resistances of the differential pressure sensor and the reference resistor are compared periodically in order to determine the condition including service life of the differential pressure sensor.

REFERENCES:
patent: 4468968 (1984-09-01), Kee
patent: 4598381 (1986-07-01), Cucci
patent: 4872349 (1989-10-01), Espiritu-Santo

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