Method for particle beam testing of substrates for liquid crysta

Details Method for particle beam testing of substrates for liquid crysta Method for particle beam testing of substrates for liquid crysta

1993-09-20

1994-12-06

Nguyen, Vinh

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

324 731, 324 96, G01R 3100

Patent

active

053714598

ABSTRACT:
Method for particle beam testing of substrates for liquid crystal displays (LCD). This is directed to methods wherein, given a substrate (SUB1) for a liquid crystal display, either potentials or, respectively, currents are set in defined fashion with a particle beam (S1, S2 and S4) and/or potentials are measured by detecting secondary electrons (S5) at different switch statuses of the switch elements (T) of the substrate (SUB1). The geometrical integrity and the electrical functionability of the substrate (SUB1) are thereby tested, even though, for example, a supplementary plane electrode is not present for forming a capacitor. An important advantage of the method is that faulty substrates can be repaired or can be segregated even before further-processing and, thus, costs can be reduced.

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