Surface examining apparatus for detecting the presence of foreig

Details Surface examining apparatus for detecting the presence of foreig Surface examining apparatus for detecting the presence of foreig

1987-02-12

1989-01-03

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356237, G01N 2188

Patent

active

047959118

ABSTRACT:
An apparatus usable with an object having a surface with a pattern, for examining the state of the surface, includes a projecting system for directing a light beam to the surface of the object, and a collecting system for collecting scattered light from the surface of the object. A projection of the optical axis of the collecting system onto the surface of the object extends in a direction different from a projection onto the surface of the object of a major portion of light diffracted from the pattern. A light-receiving unit receives the scattered light as collected by the collecting system and for producing an output corresponding to the state of the surface of the object.

REFERENCES:
patent: 4610541 (1986-09-01), Tanimoto et al.
patent: 4669875 (1987-06-01), Shiba et al.

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