Method for producing semiconductor device

Fishing – trapping – and vermin destroying

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437176, 437184, 437188, 437912, 357 15, 357 51, 357 22, H01L 21265, H01L 2144, H01L 2148

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047957174

ABSTRACT:
A semiconductor device with a FET utilizing a two-dimensional electron gas (2DEG), including a substrate, a first semiconductor layer (an undoped GaAs layer) formed on the substrate by an MBE method, a second semiconductor layer (an n-type AlGaAs layer) formed on the first layer by an MBE method, a source electrode and a drain electrode formed on the second layer and having alloyed regions, and a gate electrode formed on the second layer. To decrease the contact resistance between the alloyed regions and the 2DEG layer in the first layer, impurity doped regions are formed in the first layer under the source electrode and the drain electrode by an ion-implantation method, prior to the formation of the second layer. Further, an internal conductive line or resistor can be formed by doping impurities into the first layer by an ion-implantation method prior to the formation of the second layer.

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