Method of producing photoelectric transducers

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

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204192C, 204192S, 204192EC, 427 39, 427 74, 427 86, 136258, C23C 1500

Patent

active

044301855

ABSTRACT:
In the method of producing photoelectric transducers having processes for forming a photoconductive layer on a predetermined substrate with an irregular surface by a method of depositing the photoconductive layer in the atmosphere including at least plasma, the predetermined substrate with irregular surface is disposed above a first electrode to which an electrode is opposed, and said photoconductive layer is formed while a negative potential is being applied to the first electrode. This enables the photoconductive layer to be formed without breaks at steps, pinholes and so on due to the irregular surface, and therefore, it is possible to provide good photoelectric transducers with small dark current.

REFERENCES:
patent: 3983022 (1976-09-01), Anyang et al.
patent: 4025339 (1977-05-01), Kuehnle
patent: 4064521 (1977-12-01), Carlson
patent: 4065600 (1977-12-01), King et al.
patent: 4086555 (1978-04-01), Krikorian et al.
patent: 4116791 (1978-09-01), Zega
patent: 4117506 (1978-09-01), Carlson
patent: 4173661 (1979-11-01), Bourdon
Thin Film Processes, Ed. by John L. Vosseu et al., Academic Press, 1978, pp. 12, 13, 20, 24-28, 50-58.

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