Versatile, overpressure proof, absolute pressure sensor

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Details

7320426, 364556, 374 43, G01N 900

Patent

active

051876744

ABSTRACT:
A non membrane-based overpressure proof gas pressure microsensor. It is not a membrane-based microsensor but is based on an open microbridge sensor structure. A method and apparatus is described to determine gas pressure from thermal conductivity, k, and volumetric specific heat, c.sub.pu, as well as pressure, P, using a microbridge sensor.

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