Dual plasma microwave apparatus and method for treating a surfac

Details Dual plasma microwave apparatus and method for treating a surfac Dual plasma microwave apparatus and method for treating a surfac

1986-06-12

1987-09-08

Page, Thurman K.

Coating apparatus

With vacuum or fluid pressure chamber

With means to apply electrical and/or radiant energy to work...

118723, 118730, 427 39, 427 41, 427 47, C23C 1400, B05D 306

Patent

active

046916628

ABSTRACT:
A plasma apparatus which generates a radio frequency (UHF or microwave) disk plasma 16 and a hybrid plasma 45 derived from the disk plasma. The microwave plasma acts as a source of excited ion and free radical species and electrons for the second plasma which is hybrid in that it contains species from both microwave and dc (or rf depending on bias) excitation. The hybrid plasma can be used to treat an article 43 with different species than are present in the disk plasma and provides more control in this regard than a single plasma.

REFERENCES:
patent: 4507588 (1985-03-01), Asmussen et al.
patent: 4511593 (1985-04-01), Brandolf
patent: 4512867 (1985-04-01), Andreev et al.
patent: 4514437 (1985-04-01), Nath

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