Stock material or miscellaneous articles – Composite – Of quartz or glass
Patent
1986-08-12
1989-05-30
Lesmes, George F.
Stock material or miscellaneous articles
Composite
Of quartz or glass
136258, 338 2, 357 4, 428446, 428450, 428699, 428701, 428702, B32B 1500, H01L 2712, G01L 122
Patent
active
048350591
ABSTRACT:
The invention relates to a thin film conductor which has a composition containing silicon and germanium as major components and has a structure in which both amorphous and microcrystalline phases are present, and a method of manufacturing the same by a CVD method. The resultant thin film conductor has characteristics, such as a high dark conductivity, a large gauge factor, a small temperature coefficient of the dark conductivity, a large thermoelectric power, and the like, and is used as a material for microelectronic devices having a sensor function.
REFERENCES:
patent: 3771026 (1973-11-01), Asai et al.
patent: 4344984 (1982-08-01), Kaplan et al.
patent: 4398343 (1983-08-01), Yamazaki
patent: 4409134 (1983-10-01), Yamazaki
patent: 4435445 (1984-03-01), Allred et al.
patent: 4498092 (1985-02-01), Yamazaki
patent: 4609771 (1986-09-01), Guha et al.
Metal-Nonmetal Transition in Amorphous Si-Au System at Low Temperatures: Measurements of Electrical Conductivity and Thermoelectric Power, vol. 46, No. 3, pp. 846-854, Mar. 1979.
Anritsu Corporation
Lesmes George F.
Monroe James B.
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