Liquid composition for forming silica-based coating film

Details Liquid composition for forming silica-based coating film Liquid composition for forming silica-based coating film

1988-05-16

1989-05-30

Lusignan, Michael

Coating processes

With post-treatment of coating or coating material

Heating or drying

1062871, 10628723, 427387, 427384, B05D 302

Patent

active

048350176

ABSTRACT:
A liquid coating composition for forming a silica-based coating film on the surface of a substrate such as a semiconductor silicon wafer. A partial hydrolysis product of an alkoxy silane and an alkoxy or phenoxy compound of pentavalent antimony are dissolved in an organic solvent. As compared with a trivalent antimony compound used in the prior art, the pentavalent antimony compound as an additive is very effective in respect of the improvements in the uniformity and increased thickness of the silica-based coating film prepared from the coating composition as well as storage stability of the coating composition over time.

REFERENCES:
patent: 4247436 (1981-01-01), Baning et al.
patent: 4322476 (1982-03-01), Molari

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