Structure and fabrication method for a thin film transistor

Fishing – trapping – and vermin destroying

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437 41, 437 62, 257 63, 257307, H01L 2906, H01L 21265

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active

056078650

ABSTRACT:
A structure and fabrication method for a thin film transistor which is suitable for an SRAM memory cell. The thin film transistor structure includes an insulating substrate and a semiconductor layer formed as a wall on the insulation substrate. A gate insulation film is formed on the semiconductor layer and over the entire surface of the insulation substrate. A gate electrode formed on the gate insulation film at the center part of the semiconductor layer. Impurity regions are formed in the semiconductor layer on both sides of the gate electrode.

REFERENCES:
patent: 5065210 (1991-11-01), Hirakawa
patent: 5115289 (1992-05-01), Hisamoto et al.
patent: 5391506 (1995-02-01), Tada et al.
patent: 5459344 (1995-10-01), Wakamiya et al.

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