High-precision mask photorepeater

Details High-precision mask photorepeater High-precision mask photorepeater

1976-10-26

1978-04-18

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 54, 355 79, G03B 2742

Patent

active

040849031

ABSTRACT:
A high-precision mask photorepeater projects the image of a mask upon a sample. The sample upon which an impression is to be made is a thin plate of semiconductor material with dimensions of the order of 10 centimeters. Each zone to be recorded is brought opposite the lens. A system of pneumatic sensors brings the center of the zone to be recorded into the correct plane and positions this zone in the focal plane of the lens.

REFERENCES:
patent: 3632205 (1972-01-01), Marcy
patent: 3704657 (1972-12-01), Sliwkowski et al.
patent: 3704946 (1972-12-01), Brault et al.

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