X-ray tube and microelectronics alignment process

Details X-ray tube and microelectronics alignment process X-ray tube and microelectronics alignment process

1995-07-31

1997-05-06

Porta, David P.

X-ray or gamma ray systems or devices

Source

Electron tube

378102, H01J 3532

Patent

active

056278713

ABSTRACT:
A compact x-ray tube assembly comprises an evacuated chamber enclosed by a ceramic tubular envelope, an attached power supply at one end connected to an emitter inside the chamber, electrostatic means for focusing a beam of electrons on a metal foil target, an end window at the other end comprising said target, the thickness and composition of the metal foil target and the e-beam energy being selected to generate a microfocused bright beam of x rays of a preselected energy. The compact assembly is useful in a method for aligning or positioning layers used in the production of microelectronics components.

REFERENCES:
patent: 3668454 (1972-06-01), Shimura
patent: 5044001 (1991-08-01), Wang
patent: 5090043 (1992-02-01), Parker et al.
patent: 5422926 (1995-06-01), Smith et al.

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