Chemistry: electrical and wave energy – Apparatus – Electrolytic
Patent
1991-12-06
1995-05-23
Tung, T.
Chemistry: electrical and wave energy
Apparatus
Electrolytic
65102, 20415321, 204433, G01N 2736
Patent
active
054178371
ABSTRACT:
A small glass electrode and process for preparation thereof are disclosed. This small glass electrode is characterized in that said glass electrode, which has a bonded structure comprises a reference electrode composed of silver/silver chloride, a glass substrate having a pad embedded therein, said pad being composed of gold or platinum and circuit-connected to the reference electrode, and a silicon substrate having a (100) plane selectively etched by the anisotropic etching technique and comprising a groove for injecting an electrolyte composed of an aqueous solution containing chlorine such as KCl, or HCl, at least one hole for holding the electrolyte and a glass film formed in a portion corresponding to the reference electrode. By this structure, the small glass electrode can be easily manufactured at a low cost.
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Kojima Naomi
Sugama Akio
Suzuki Hiroaki
Fujitsu Limited
Tung T.
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