Thin film hydrogen sensor

Details Thin film hydrogen sensor Thin film hydrogen sensor

1997-04-11

1999-03-23

Walberg, Teresa

Electrical resistors

Resistance value responsive to a condition

Gas, vapor, or moisture absorbing or collecting

422 90, H01C 700

Patent

active

058866140

ABSTRACT:
A thin film hydrogen sensor, includes: a substantially flat ceramic substrate with first and second planar sides and a first substrate end opposite a second substrate end; a thin film temperature responsive resistor on the first planar side of the substrate proximate to the first substrate end; a thin film hydrogen responsive metal resistor on the first planar side of the substrate proximate to the fist substrate end and proximate to the temperature responsive resistor; and a heater on the second planar side of the substrate proximate to the first end.

REFERENCES:
patent: 4373375 (1983-02-01), Terhune et al.
patent: 5367283 (1994-11-01), Lauf et al.
patent: 5373205 (1994-12-01), Busick et al.
patent: 5382943 (1995-01-01), Tanaka et al.
patent: 5470756 (1995-11-01), Coles et al.
patent: 5561964 (1996-10-01), McIntyre et al.
patent: 5670115 (1997-09-01), Cheng et al.

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