Surface examining apparatus for detecting the presence of foreig

Details Surface examining apparatus for detecting the presence of foreig Surface examining apparatus for detecting the presence of foreig

1989-05-02

1989-12-12

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356237, 356430, G01N 2188, G01N 2189

Patent

active

048869759

ABSTRACT:
An apparatus usable with an object having surfaces, for examining the states of the surfaces, includes on irradiating system for irradiating the surfaces of the object with a single light beam, and a plurality of light-receiving systems provided in association with the surfaces of the object, respectively, the plural light-receiving systems being arranged to receive light scatteringly reflected from the surfaces of the object, respectively, and to produce outputs corresponding to the states of the surfaces of the object, respectively.

REFERENCES:
patent: 3814946 (1974-06-01), Takahashi et al.
patent: 4460273 (1984-07-01), Koizumi et al.

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