Optical: systems and elements – Diffraction – From grating
Patent
1994-11-01
1997-12-16
Dzierzynski, Paul M.
Optical: systems and elements
Diffraction
From grating
359565, 359566, 21912178, G02B 518, G02B 2744, B23K 2602
Patent
active
056991851
ABSTRACT:
The apparatus for machining and material processing includes an excimer laser and a Fresnel zone plate array (FZP) positioned parallel to the workpiece, with the distance between the FZP and the workpiece being the focal length of the FZP. For each hole to be formed on the workpiece a corresponding Fresnel zone is patterned onto the FZP. Each Fresnel zone may be patterned directly centered over the desired hole location or in high density patterns it may be located off-center from the hole with deflection being accomplished by the formation of finer circular arcs on the side of the Fresnel zone opposite the desired direction of deflection. A beam scanner is included to provide a more uniform illumination of the FZP by the laser beam. The scanning eliminates non-uniformity of intensity. The alignment mechanism uses a helium-neon laser, the beam from the which is projected onto a surface relief grating on the workpiece. The reflected light from the surface relief grating is filtered to create interference fringes which, when aligned, provide maximum light intensity projected through a transmission grating on the Fresnel zone plate.
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Michael R. Feldman, et al., "Computer generated holographic optical elements for optical interconnection of very large scale integrated circuits," Applied Optics, vol. 26, No. 20, 15 Oct. 1987.
Michael R. Feldman, Ph.D. Thesis, "Optical Interconnections for VSLI Computational Systems Using Computer Generated Holography," University of California, San Diego, 1989, pp. 26, 28, 46, 57, 59, 62, 81, 179, 181, and 198.
Guest Clark C.
Hunter, Jr. Robert O.
MacDonald Bruce G.
Smith Adlai H.
Chang Audrey
Dzierzynski Paul M.
Litel Instruments
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