Method and system for loading wafers

Details Method and system for loading wafers Method and system for loading wafers

1986-10-28

1989-12-12

Werner, Frank E.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414627, 4147448, 414225, 414217, 414737, 414680, 414752, 901 6, B65G 4791

Patent

active

048864129

ABSTRACT:
A wafer transport system includes a mobile frame, a wafer cassette conveyor, a wafer support table, and a wafer transfer assembly. The wafer cassette conveyor carries a plurality of wafer cassettes and presents them successively to a transfer location. The wafer transport assembly, including a robotic arm and a vacuum pickup element, is then able to transport individual wafers from the cassettes to the support table. By rotating the support table, a plurality of wafers can be placed in a desired order. The wafer support table may then be moved to a location proximate a processing chamber, such as a chemical vapor deposition reactor, and processed and unprocessed wafers efficiently exchanged by the transport assembly.

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patent: 4359815 (1982-11-01), Toyoda
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patent: 4500407 (1985-02-01), Boys et al.
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patent: 4534695 (1985-08-01), Stump et al.
patent: 4558984 (1985-12-01), Garrett
patent: 4566726 (1986-01-01), Correnti et al.
patent: 4603897 (1986-08-01), Foulke et al.
patent: 4701096 (1987-10-01), Fisher, Jr.
Solid State Technology, "Wafer Handling Robot", Copyright Jan. 1985.
"The Dawn of Epitaxy's New Era", May 1986, Semiconductor Intnl., pp. 69-72.
"Next Generation Epitaxial Silicon Deposition System", May 1986, Semiconductor International, pp. 250-251.

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