Methods of fabricating integrated transducer assemblies

Details Methods of fabricating integrated transducer assemblies Methods of fabricating integrated transducer assemblies

1974-09-11

1976-02-03

Tupman, W.

Metal working

Method of mechanical manufacture

Assembling or joining

29589, 29610SG, B01J 1700

Patent

active

039356345

ABSTRACT:
A transducer assembly comprises a thin diaphragm of silicon having at least one piezoresistive element located in a central active area of the diaphragm. The diaphragm has a metal ring containing terminal accommodating apertures about the periphery thereof. The metal ring bounds the outermmost portion of the diaphragm designated as a non-active area. An annular housing fabricated from a high dielectric material has a series of wire accommodating grooves in a side wall thereof each one aligned with a predetermined one of said terminal accommodating apertures. The metal ring is secured to the annular housing with the active area of the diaphragm surrounded by a central aperture of the annular housing. The metal ring is secured to the housing by an electrostatic glass bond.

REFERENCES:
patent: 3641516 (1972-02-01), Castrucci
patent: 3641661 (1972-02-01), Canning
patent: 3654579 (1972-04-01), Kurtz

Affiliated with

Also associated with

Rating

Methods of fabricating integrated transducer assemblies does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Methods of fabricating integrated transducer assemblies, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods of fabricating integrated transducer assemblies will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2116170