Fishing – trapping – and vermin destroying
Patent
1992-04-24
1993-03-09
Quach, T. N.
Fishing, trapping, and vermin destroying
437231, 437228, H01L 21316
Patent
active
051927152
ABSTRACT:
Before spin-on-glass (SOG) is applied and soft-cured over metal traces (10) having a height/width aspect ratio (of the spaces) of at least 1, the aluminum metal traces are selectively coated with selective tungsten (16). After SOG (18) is spun on and soft-cured, it is etched back to expose the metal interconnects. A selective tungsten wet etch in H.sub.2 O.sub.2 detaches the SOG from the metal walls, leaving silt-like voids (20). Stress-free SOG hard curing may now proceed. A capping layer (22) of SOG may now be applied, soft-cured, then hard-cured. Alternatively, other dielectric materials may be applied as the capping layer. Further, interfacial lateral sidewall voids (24) may be deliberately left unfilled, by employing a capping layer (22') of vapor-deposited oxide. The unfilled voids have a dielectric constant of 1.0, which is useful in extremely high speed devices. The resulting structure is comparatively stress-free as fabricated and is resistant to later environmentally-induced brittle tensile fracture.
REFERENCES:
patent: 4775550 (1988-10-01), Chu et al.
patent: 4914049 (1990-04-01), Huang et al.
patent: 4986878 (1991-01-01), Malazgirt et al.
patent: 4996165 (1991-02-01), Chang et al.
patent: 5003062 (1991-03-01), Yen
Dixit Pankaj
Sliwa, Jr. John W.
Advanced Micro Devices , Inc.
Quach T. N.
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