Laser scanning optical microscope

Optical: systems and elements – Compound lens system – Microscope

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Details

359368, 359201, G02B 2106, G02B 2100, G02B 2608

Patent

active

056918399

ABSTRACT:
A laser scanning optical microscope comprises a laser light source which focuses a laser beam to a small spot through an objective optical system, and the laser beam is projected along a light path onto a specimen while also being scanned two-dimensionally. A first scanning device scans the specimen in a first direction with a first scanning frequency. A second scanning device scans the specimen in a second direction perpendicular to the first direction with a second scanning frequency lower than the first frequency. A third scanning device scans the specimen in third direction parallel to the first direction at a third frequency lower than the first and second frequencies. A light receiving element receives light reflected or transmitted by the scanned specimen and produces a photoelectric signal. A signal processing device converts the photoelectric signal to a signal capable of being monitored on a monitor having a television scanning line system with predetermined horizontal and vertical scanning frequencies corresponding to the second and third scanning directions.

REFERENCES:
patent: 4971413 (1990-11-01), Inoue
patent: 5225923 (1993-07-01), Montagu
patent: 5225924 (1993-07-01), Ogawa et al.
patent: 5386112 (1995-01-01), Dixon
patent: 5394268 (1995-02-01), Lanni et al.

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