SOG curing by ion implantation

Details SOG curing by ion implantation SOG curing by ion implantation

1992-01-27

1993-03-09

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437231, 437240, H01L 21265

Patent

active

051926970

ABSTRACT:
Ion Implantation is used to cure spin-on-glass layers. Ions, such as Argon or Arsenic are implanted into the spin-on-glass layer of an article. The action of the ion moving through the spin-on-glass layer causes internal heating. This heating cures the spin-on-glass layer of the article.

REFERENCES:
patent: 4983546 (1991-01-01), Hyun et al.
patent: 5003062 (1991-03-01), Yen

Affiliated with

Also associated with

Rating

SOG curing by ion implantation does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with SOG curing by ion implantation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and SOG curing by ion implantation will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-211027