Optical instrument and measurement for measuring displacement of

Details Optical instrument and measurement for measuring displacement of Optical instrument and measurement for measuring displacement of

1994-04-13

1996-03-12

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356351, G01B 902

Patent

active

054990963

ABSTRACT:
In an instrument and method for optically measuring a displacement of a scale which can achieve the noise elimination of returning light to a coherent light source, the scale and optical system are so constructed that an intersecting point of light fluxes radiated from the coherent light source and split into those fluxes by means of a first beam splitter is not present on a transmitting type diffraction grating and the incident lights (d, e) on a reflecting plate and the reflected lights (f, g) from the reflecting plate have no common use of the same light paths.

REFERENCES:
patent: 4970388 (1990-11-01), Nishimura et al.
patent: 4979826 (1990-12-01), Ishizuka et al.
patent: 5035507 (1991-07-01), Nishioki et al.
patent: 5120132 (1992-06-01), Spies et al.
patent: 5258861 (1993-11-01), Tsuchiya
"Van Nostrand's Scientific Encyclopaedia", 1968, p. 525.

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