Method of making multi-layer address lines for amorphous silicon

Details Method of making multi-layer address lines for amorphous silicon Method of making multi-layer address lines for amorphous silicon

1992-06-12

1996-03-12

Fourson, George

Fishing, trapping, and vermin destroying

437194, 437 50, 257 59, H01L 21441

Patent

active

054985730

ABSTRACT:
Each scan line of a liquid crystal display (LCD) includes: a first layer of titanium disposed on the LCD substrate surface to promote adhesion of the scan line to the substrate surface; a layer of molybdenum or aluminum disposed on the first titanium layer to provide a low resistance address line; and a second layer of titanium disposed on the molybdenum layer to promote adhesion of a subsequently deposited layer of passivation material, semiconductor material or the like over the scan line. The multi-layered scan line side walls may be etched to promote step coverage of subsequently deposited layers of material. The data lines may also have a multi-layer conductor structure similar to the scan lines.

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patent: 5062690 (1991-11-01), Whetten
patent: 5148248 (1992-09-01), Possin et al.
patent: 5153754 (1992-10-01), Whetten

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