Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1976-11-15
1978-09-05
Newsome, John H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
219121EB, 427 42, B05D 306
Patent
active
041121376
ABSTRACT:
An insulating substrate, such as a glass windscreen, is coated with a conductive coating of an oxide of at least one metal by a process in which the substrate is subjected, in a rarefied oxygen atmosphere, to metal ions and oxygen ions arising from bombardment of a metal source with an electron beam and the proximity to the substrate of a negatively biased grid serving to accelerate the metal ions to the substrate where they combine with oxygen to form an oxide coating.
REFERENCES:
patent: 848600 (1907-03-01), von Pirani
patent: 3492152 (1970-01-01), Cariou et al.
patent: 3562141 (1971-02-01), Morley
patent: 3634647 (1972-01-01), Dale
patent: 3912462 (1975-10-01), Balthis et al.
Murayama, "J. Vac. Sci. Tech.", v. 12, #4, Jul./Aug. 1975, pp. 818-820.
Battelle (Memorial Institute)
Newsome John H.
Ross Karl F.
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