Wave front aberration measuring apparatus

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356359, G01B 902

Patent

active

047115769

ABSTRACT:
A wave front aberration measuring apparatus comprises light splitter for splitting a light beam to be measured into a first light beam and a second light beam, a first converter for deflecting the first beam by 180.degree. and laterally displacing the advancing direction thereof, a second converter for deflecting the second beam by 180.degree. and laterally displacing the advancing direction thereof, an interference fringe former for superposing the first and second beams guided by the first and second converters to form interference fringes and an interference fringe observing device for measuring or observing the state of the interference fringes obtained by the interference fringe former to discriminate the state of the wave front of the light beam to be measured from the state of the interference fringes, wherein at least one of the first and second converters is rendered movable with respect to the light splitter.

REFERENCES:
patent: 4575248 (1986-03-01), Horwitz et al.
Murty, "A Compact Radial Shearing Interferometer Based on the Law of Refraction", Applied Optics, vol. 3, No. 7, pp. 853-857, 7/64.
Steel, Interferometry, Cambridge University Press, p. 27, 1983.

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