Process for fabricating electrically programmable antifuse eleme

Details Process for fabricating electrically programmable antifuse eleme Process for fabricating electrically programmable antifuse eleme

1992-05-22

1992-12-15

Quach, T. N.

Fishing, trapping, and vermin destroying

437 52, 437190, 437228, 437922, 148DIG55, H01L 21283, H01L 2190

Patent

active

051717158

ABSTRACT:
An antifuse according to the present invention includes a lower electrode formed from a first metal interconnect layer in an integrated circuit or the like. The lower electrode is disposed on an insulating surface. An inter-metal dielectric including an antifuse aperture disposed there lies over the inter-metal dielectric layer. The antifuse aperture extends through the inter-metal dielectric layer and also extends completely through the lower electrode. An antifuse material is disposed in the antifuse aperture. An upper electrode formed from a first metal interconnect layer is disposed over the antifuse material.

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Chen, K. L., et al., "A Sublithographic Antifuse Structure for Field-Programmable . . . ", IEEE Electron Device Letters, vol. 13, No. 1, Jan. 1992, pp. 53-55.

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