Coating apparatus – Gas or vapor deposition – Work support
Patent
1992-03-23
1993-11-30
Chaudhuri, Olik
Coating apparatus
Gas or vapor deposition
Work support
118733, 29 2501, B44C 122, H01L 21306
Patent
active
052661199
ABSTRACT:
A semiconductor device producing apparatus includes a processing chamber having an opening and capable of being vacuum sealed, a carrier member including a substrate holder, an arm member, and a substrate carrier which vertically reciprocates in the opening of the processing chamber. A vacuum bellows is divided into an upper bellows and a lower bellows that are attached to a hollow flange therebetween. The upper bellows is a double structure having an inner bellows and an outer bellows. An air inlet is formed in the hollow flange and air is introduced through the inlet into a ring-shaped space between the inner bellows and the outer bellows. Therefore, thrust caused by the vacuum in the processing chamber and applied to the hollow flange is cancelled by the pressure of the introduced air whereby a load on the driving part is relieved. As a result, a small-sized and inexpensive semiconductor device producing apparatus is obtained.
REFERENCES:
patent: 4213051 (1980-07-01), Struthoff
patent: 5100502 (1992-03-01), Murdoch et al.
Satou Hiroshi
Taniguchi Takao
Chaudhuri Olik
Graybill David E.
Mitsubishi Denki & Kabushiki Kaisha
LandOfFree
Vacuum sealing mechanism for a semiconductor device manufacturin does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Vacuum sealing mechanism for a semiconductor device manufacturin, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vacuum sealing mechanism for a semiconductor device manufacturin will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2092475