Semiconductor type pressure sensor

Details Semiconductor type pressure sensor Semiconductor type pressure sensor

1998-08-25

2000-09-26

Fuller, Benjamin R.

Measuring and testing

Fluid pressure gauge

Electrical

73715, G01L 900, G01L 708

Patent

active

061229741

ABSTRACT:
A pressure sensor superior in pressure resistance and capable of covering from a low to high pressure range as a measuring range is to be provided. Plural pressure sensing sections for high and low pressures are formed on a silicon board, the pressure sensing sections each com ing an outer frame portion, a diaphragm portion, a strain gauge portion and an electrode portion. The silicon board side with the strain gauge portions formed thereon and an insulating substrate having electrode take-out portions are bonded together in such a manner that the strain gauge portions are hermetically sealed and that the electrode portions on the silicon board and the electrode take-out portions of the insulating substrate are electrically connected with each other, to constitute a pressure sensing unit. The pressure sensing unit, a low-melting glass and a stem are laminated together in such a manner that lead pins are electrically bonded by solder to the electrode portions of the silicon board through the electrode take-out portions of the insulating substrate. In this state, the low-melting glass is melted to bond the pressure sensing unit and the stem with each other.

REFERENCES:
patent: 4314225 (1982-02-01), Tominaga et al.
patent: 4780572 (1988-10-01), Kondo et al.
patent: 4838089 (1989-06-01), Okada et al.
patent: 4993265 (1991-02-01), Koen et al.
patent: 5101665 (1992-04-01), Mizuno
patent: 5511428 (1996-04-01), Goldberg et al.

Affiliated with

Also associated with

Rating

Semiconductor type pressure sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor type pressure sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor type pressure sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2091261