Two-valve thin plate micropump

Details Two-valve thin plate micropump Two-valve thin plate micropump

1990-12-21

1992-12-15

Bertsch, Richard A.

Pumps

Motor driven

Electric or magnetic motor

417322, F04B 1700

Patent

active

051711320

ABSTRACT:
A micropump particularly suited for use in the fields of medicine and analysis includes a thin membrane plate sandwiched between a surface plate and a glass-made substrate. The intermediate membrane has an inlet valve and an outlet valve and the glass substrate has an inlet port and an outlet port, respectively connected to the corresponding valves. Between the valves formed in the thin membrane plate by means of etching, there is a diaphragm on which there is a piezoelectric element for detecting behavior of the diaphragm. Another micropump has an upper thin membrane plate member and a lower member. The upper member has the inlet valve and the lower member has the outlet valve. An intermediate glass substrate is inserted between the upper and the lower thin membrane plate member.

REFERENCES:
patent: 649886 (1987-03-01), Igashira et al.
patent: 4520375 (1985-05-01), Krall
patent: 4636149 (1987-01-01), Brown
patent: 4842493 (1989-06-01), Nilsson
patent: 4911616 (1990-03-01), Laumann, Jr.
patent: 4938742 (1990-07-01), Smits
patent: 4939405 (1990-07-01), Okayama et al.

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