Patterned layer article and manufacturing method therefor

Details Patterned layer article and manufacturing method therefor Patterned layer article and manufacturing method therefor

1980-07-07

1982-09-21

Hess, Bruce H.

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

156643, 1566591, 156667, 156904, 204192E, 428432, 428469, 428472, 428697, 428701, 428702, B32B 310, B32B 1504, B44C 122, C23F 102

Patent

active

043507298

ABSTRACT:
A patterned layer article for semiconductor devices or stripe filters of color television cameras characterized by using, as a base, a protective layer of an etching rate smaller than that of a thin layer for controlling the etching depth of the thin layer, and this protective layer, particularly consists of oxides of rare earth elements such as yttrium oxide, and scandium oxide.

REFERENCES:
patent: 4106975 (1978-08-01), Berkenblit
patent: 4134777 (1979-01-01), Borom

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