Optical monitoring system for III-V wafer processing

Details Optical monitoring system for III-V wafer processing Optical monitoring system for III-V wafer processing

Filed on

1998-06-26

Date issued

2000-06-13

Examiner

Ullah, Akm E.

Patent Class

Optical waveguides

SubClass

Integrated optical circuit

Other Related Categories

G02B 612

Type

Patent

Status

active

Patent number

060759097

Description

ABSTRACT:
An optical monitoring system for III-V integrated circuit wafers utilizes an optical transmitter/receiver assembly formed in the wafer at an early stage in the fabrication process. The optical transmitter is then activated and the optical output signal is monitored during subsequent processing steps, such as ion implantation and layer deposition to assess the quality of the process. In one embodiment, the monitoring system is useful as an endpoint detection process.

REFERENCES:
patent: 4659220 (1987-04-01), Bronte et al.
patent: 5414504 (1995-05-01), Litvak et al.
patent: 5465154 (1995-11-01), Litvak et al.
patent: 5786886 (1998-07-01), Litvak et al.
patent: 5946082 (1999-10-01), Litvak et al.
patent: 5969639 (1999-10-01), Lauf et al.

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