Automatic wafer orienting apparatus

Conveyors: power-driven – Conveyor system for arranging or rearranging stream of items – By laterally or vertically moving successive items in...

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198380, 302 2R, 198394, B65G 4724

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active

039826279

ABSTRACT:
An apparatus for automatically orienting wafers of semiconductive material to a desired position individually, each wafer having a round periphery provided with a linear or recessed portion formed therein and with a pair of resultant edges formed at the points of intersection between that portion and the other portion to serve as a distinctive physical feature with which a mechanism interacts to impart an orientation to the wafer in cooperation with an idler. This mechanism comprises a rotary head and a guide abutment positioned adjacent with each other on a horizontally disposed wafer support plate having a number of holes switchable between vacuum and pressure in an area on which the wafer is placed so that while being slightly floated from the support surface and impelled to abutting engagement with the rotary head and the idler arranged in spaced relation to each other on the opposite side of the rotary head to the guide abutment, the wafer is rotated by the rotary head until one of the pair of edges strikes said flat guide surface at a point from which it is slidingly moved in a linear direction along the flat guide surface of the abutment to a certain point where the rotary head imparts no further rotative movement to the wafer.

REFERENCES:
patent: 2293553 (1942-08-01), Magnusson
patent: 3297134 (1967-01-01), Pastuszak
patent: 3797889 (1974-03-01), Wilkinson
IBM Technical Disclosure Bulletin, vol. 14, No. 4, p. 1021; Sept. 1971; "Wafer Orientator" by Fox et al.

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