High-precision stepped microstructure bodies

Details High-precision stepped microstructure bodies High-precision stepped microstructure bodies

1996-04-02

1998-02-10

Niebling, John

Radiation imagery chemistry: process, composition, or product th

Micrography, process, composition, or product other than...

205 50, G03F 700

Patent

active

057167419

ABSTRACT:
The present invention concerns stepped mould inserts, a method of producing the same and high-precision stepped microstructure bodies moulded therewith. The present stepped mould inserts and method of producing the same are more simple than previous methods. The lithographically produced regions of a patterned resist layer, which are exposed by development on a flat plate, are filled with metal. The layer may be mechanically removed, down to a predetermined thickness. After the residues of the resist have been dissolved out, if necessary or desired, this operation is repeated from one to several times. The regions removed from the resist layer are filled with metal, covered and separated from the resist layer, thus providing a multistep metallic mould insert. High-precision microstructure bodies having a multistep structure are produced with the present stepped mould insert.

REFERENCES:
patent: 5234571 (1993-08-01), Noeker
patent: 5260175 (1993-11-01), Kowanz
patent: 5311604 (1994-05-01), Rogner
patent: 5529681 (1996-06-01), Reinecke et al.

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