Ultraviolet solid state laser, method of using same and laser su

Details Ultraviolet solid state laser, method of using same and laser su Ultraviolet solid state laser, method of using same and laser su

1996-08-14

1998-04-21

Healy, Brian

Coherent light generators

Particular beam control device

Nonlinear device

372 20, 372 21, 372 23, 359326, 359328, 359330, 606 3, 606 4, 606 5, 606 10, H01S 310, G02F 135, A61B 1736

Patent

active

057426260

ABSTRACT:
A solid state laser system producing coherent radiations at deep ultraviolet wavelengths includes a solid state laser producing a first beam having a wavelength near 1 micron. The 1 micron beam is passed to both a harmonic generation stage and to a tunable optical parametric oscillator. The harmonic generation stage is configured to produce a fifth harmonic of the 1 micron beam, while the optical parametric oscillator produces a tunable beam in the near infrared spectrum (e.g., approximately 2.075 micron). The fifth harmonic and the near infrared beams are mixed in a sum frequency generator to produce a highly coherent beam in the deep ultraviolet (e.g., between approximately 180 nm to 213 nm).

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