Unit for vaporizing liquid materials

Details Unit for vaporizing liquid materials Unit for vaporizing liquid materials

1998-02-10

2000-06-13

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

118715, C23C 1600

Patent

active

060744871

ABSTRACT:
The object of the invention is to provide a unit for vaporizing liquid materials which can adjust not only a mixing rate but also a concentration of the mixed liquid easily and accurately and which can effectively vaporize a large amount of the liquid material.
A unit for vaporizing liquid materials in accordance with the invention is for mixing a plurality of liquid materials and comprises a plurality of containers each of which contains a different liquid material which is made by dissolving a material into a solvent, a container exclusive for solvent which contains the same or the same kind of solvent used for the liquid materials, a liquid conveying means which conveys the liquid materials from the containers and the solvent from the container exclusive for solvent, and a vaporizing means which sprays the liquid materials and the solvent conveyed by the liquid conveying means and vaporizes the sprayed liquid materials and the sprayed solvent.

REFERENCES:
patent: 5273622 (1993-12-01), Jacobsen
patent: 5670218 (1997-09-01), Baek
patent: 5776254 (1998-07-01), Yuuki et al.
patent: 5779804 (1998-07-01), Mikoshiba et al.

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