Pressure detecting apparatus

Details Pressure detecting apparatus Pressure detecting apparatus

1997-02-24

1999-02-16

Biegel, Ronald L.

Measuring and testing

Fluid pressure gauge

Diaphragm

G01L 904

Patent

active

058723153

ABSTRACT:
A pressure detecting apparatus includes a sensing body with a diaphragm to which pressure is applied and a strain gauge plate having a {100} silicon substrate and a glass base, which is bonded on the sensing body. A thin portion and through holes are formed in the silicon substrate so that the thin portion has a beam structure on which strain gauges are formed. When the pressure is applied, the resistances of the strain gauges change in a positive direction, while the resistances of the strain gauges change in a negative direction. Accordingly, the linearity of the output from the pressure detecting apparatus can be improved.

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