Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1998-07-10
2000-06-13
Larkin, Daniel S.
Measuring and testing
Surface and cutting edge testing
Roughness
250306, G01B 734
Patent
active
06073485&
ABSTRACT:
There is disclosed a scanning probe microscope capable of producing a topographic image at a high resolution with a cantilever of a large spring constant and, at the same time, a surface potential image at a high resolution. This microscope can take the form of an atomic force microscope that detects the surface potential of a sample, using a gradient of the force acting between the probe tip and a sample. The gradient is represented by the output from a frequency-to-voltage converter. The frequency of an AC voltage applied across the probe tip and the sample is so set that a z-signal fed back to the cantilever to maintain constant the shift in the resonance frequency of the cantilever can sufficiently follow the AC voltage.
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patent: 5631410 (1997-05-01), Kitamura
"Kelvin Probe Force Microscopy", Nonnenmacher, O'Boyle and Wickramasinghe, Appl. Phys. Lett., vol. 58, No. 25, Jun. 24, 1991, pp. 2921-2923.
Jeol Ltd.
Larkin Daniel S.
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